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1

Process integration and nanometer-scale electrical characterization of crystalline high-k gate dielectrics

Udo Schwalke, Yordan Stefanov

Journal:

Microelectronics Reliability

Year:

2005

Language:

english

File:

PDF, 271 KB

english, 2005

2

Electrical characterization of crystalline Gd2O3 gate dielectric MOSFETs fabricated by damascene metal gate technology

Ralf Endres, Yordan Stefanov, Udo Schwalke

Journal:

Microelectronics Reliability

Year:

2007

Language:

english

File:

PDF, 275 KB

english, 2007

3

Process damage-free damascene metal gate technology for gentle integration of epitaxially grown high-k

Ralf Endres, Yordan Stefanov, Frank Wessely, Florian Zaunert, Udo Schwalke

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 962 KB

english, 2008

4

Study of pinholes in ultrathin SiO2 by C-AFM technique

Vaibhav G. Marathe, Yordan Stefanov, Udo Schwalke, Nandita DasGupta

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 1.03 MB

english, 2006

5

Plant experiments with light-emitting diode module in Svet space greenhouse

Iliana Ilieva, Tania Ivanova, Yordan Naydenov, Ivan Dandolov, Detelin Stefanov

Journal:

Advances in Space Research

Year:

2010

Language:

english

File:

PDF, 442 KB

english, 2010

6

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Damascene Metal Gate Technology for Gentle Integration of Crystalline High-K-Gate Dielectrics

Endres, Ralf, Stefanov, Yordan, Schwalke, Udo

Year:

2006

Language:

english

File:

PDF, 683 KB

english, 2006

7

Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization

Stefanov, Yordan, Ruland, Tino, Schwalke, Udo

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 569 KB

english, 2004

8

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Conductive AFM Measurements on Carbon Nanotubes and Application for CNTFET Characterization

Rispal, Lorraine, Ruland, Tino, Stefanov, Yordan, Wessely, Frank, Schwalke, Udo

Year:

2006

Language:

english

File:

PDF, 822 KB

english, 2006

9

[IEEE 2018 IEEE XXVII International Scientific Conference Electronics (ET) - Sozopol, Bulgaria (2018.9.13-2018.9.15)] 2018 IEEE XXVII International Scientific Conference Electronics - ET - Influence of the Layout Parasitic Effects on the Performance of Current Mode Amplifier Designed Using 32nm CMOS Technology

Hristov, Yordan Stefanov, Kostadinov, Simeon Dimitrov, Gaydazhiev, Dobromir Georgiev, Uzunov, Ivan Stefanov

Year:

2018

File:

PDF, 481 KB

2018